Specific Process Knowledge/Thermal Process/RTP Jipelec 2: Difference between revisions
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*40-2000 sccm | *40-2000 sccm | ||
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|style="background:Silver; color:black"|Forming gas (4% H<sub>2</sub>/ 96% N<sub>2</sub>) | |style="background:Silver; color:black"|Forming gas (4% H<sub>2</sub>/ 96% N<sub>2</sub>) | ||