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Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions

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==Etching of nanostructures in silicon using the ICP Metal Etcher or DRIE Pegasus==
==Etching of nanostructures in silicon using the ICP Metal Etcher or DRIE Pegasus==
*[[Specific Process Knowledge/Etch/ICP Metal Etcher/nanoetch/180nmzep|The 180 nm zep resist profiles]]


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