Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions
| Line 13: | Line 13: | ||
|- | |- | ||
!Tool | !Tool | ||
|Metal | |ICP Metal | ||
|Metal | |ICP Metal | ||
|Metal | |ICP Metal | ||
|Metal | |ICP Metal | ||
|Metal | |ICP Metal | ||
|Metal | |ICP Metal | ||
|Metal | |ICP Metal | ||
|Metal | |ICP Metal | ||
|- | |- | ||
!Cl<sub>2</sub> (sccm) | !Cl<sub>2</sub> (sccm) | ||