Specific Process Knowledge/Lithography/EBeamLithography/JEOL 9500 User Guide: Difference between revisions
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=Job execution with alignment= | |||
Execution of jobs that require alignment requires a few additional steps compared to the process described above. The additional steps are: | |||
*Optical prealignment of the mounted substrate to determine PQ mark offsets and substrate rotation | |||
*Gain correction to ensure the backscatter detector provides sufficient signal for mark detection using '''AGCRG''' | |||
*Verification of PQ mark detection using '''SETWFR''' | |||
*Verification of chip mark detection using '''CHIPAL''' if chip marks are used | |||