Specific Process Knowledge/Lithography/EBeamLithography/Dose Testing: Difference between revisions
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=Scripted expansion of a PEC modulation table= | =Scripted expansion of a PEC modulation table= | ||
The last method is basically the same as the second method above but with support for PEC modulation. This is achieved by expanding the dose modulation table into a set of tables, one for each dose of the dose test. Each modulation table is a scaled version of the initial modulation table, scaled simply by the dose test scaling between each dose. The scaling is done through a Matlab script which can be found | The last method is basically the same as the second method above but with support for PEC modulation. This is achieved by expanding the dose modulation table into a set of tables, one for each dose of the dose test. Each modulation table is a scaled version of the initial modulation table, scaled simply by the dose test scaling between each dose. The scaling is done through a Matlab script which can be found below. Since Labadviser does not allow upload of .m files, simply copy the script from below and save as a .m file. | ||
Benefits: | Benefits: | ||