Specific Process Knowledge/Lithography/EBeamLithography/Dose Testing: Difference between revisions
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The output is a single JDI file containing all modulation tables named '''MODx''', where x is a running number from 1 to '''m'''. The array and reference to each modulation table can then be set up in the JDF file as seen below. It is convenient to use the include command '''@''' to reference the JDI file itself rather than copy-paste the tables into the JDF. | The output is a single JDI file containing all modulation tables named '''MODx''', where x is a running number from 1 to '''m'''. The array and reference to each modulation table can then be set up in the JDF file as seen below. It is convenient to use the include command '''@''' to reference the JDI file itself rather than copy-paste the tables into the JDF. | ||
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! width=100% | Example JDF with a dose test setup defined by the '''ARRAY''' command and reference to individual modulation tables. | |||
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<pre> | <pre> | ||
JOB/W 'THOPE',4 | JOB/W 'THOPE',4 | ||
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END | END | ||
</pre> | </pre> | ||
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! width=100% | Example JDI file as output by the Matlab script. | |||
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<pre> | <pre> | ||
MOD1: MODULAT (( 0, -23.6 ) , ( 1, -22.8 ) , ( 2, -22 ) | MOD1: MODULAT (( 0, -23.6 ) , ( 1, -22.8 ) , ( 2, -22 ) | ||
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</pre> | </pre> | ||
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