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Specific Process Knowledge/Lithography/EBeamLithography/Dose Testing: Difference between revisions

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Thope (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
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=Scripted expansion of a PEC modulation table=
=Scripted expansion of a PEC modulation table=
The last method is basically the same as the second method above but with support for PEC modulation. Thus in this method we will expand the PEC modulation table into a number of PEC and dose test modulated tables, i.e. we will get one unique table per dose.
The last method is basically the same as the second method above but with support for PEC modulation. This is achieved by expanding the dose modulation table into a set of tables, one for each dose of the dose test. Each modulation table is a scaled version of the initial modulation table, scaled simply by the dose test scaling between each dose. The scaling is done through a Matlab script which can be found here.
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