Specific Process Knowledge/Lithography/EBeamLithography/Dose Testing: Difference between revisions
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=Using ChipPlace in Beamer= | =Using ChipPlace in Beamer - recommended for most cases= | ||
ChipPlace is part of Beamer and offers a graphical user interface to layout exposure jobs. In ChipPlace one can create arrays of pattern elements and assign doses to each pattern element. The output is a single design file and a single modulation table. The design file will contain all pattern elements and can be exported to V30. The modulation table is exported as JDI and will contain any PEC modulation applied to the design as well as modulation from the chosen dose range. Please refer to [https://labadviser.nanolab.dtu.dk/index.php?title=Specific%20Process%20Knowledge/Lithography/EBeamLithography/BEAMER#ChipPlace the Beamer page for a guide on how to set this up.] | ChipPlace is part of Beamer and offers a graphical user interface to layout exposure jobs. In ChipPlace one can create arrays of pattern elements and assign doses to each pattern element. The output is a single design file and a single modulation table. The design file will contain all pattern elements and can be exported to V30. The modulation table is exported as JDI and will contain any PEC modulation applied to the design as well as modulation from the chosen dose range. Please refer to [https://labadviser.nanolab.dtu.dk/index.php?title=Specific%20Process%20Knowledge/Lithography/EBeamLithography/BEAMER#ChipPlace the Beamer page for a guide on how to set this up.] This method supports PEC modulation and is recommendable for most users. | ||
Benefits: | Benefits: | ||