Specific Process Knowledge/Lithography/EBeamLithography/Dose Testing: Difference between revisions
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=Using | =Using ChipPlace in Beamer= | ||
ChipPlace is part of Beamer and offers a graphical user interface to layout exposure jobs. In ChipPlace one can create arrays of pattern elements and assign doses to each pattern element. The output is a single design file and a single modulation table. The design file will contain all pattern elements and can be exported to V30. The modulation table is exported as JDI and will contain any PEC modulation applied to the design as well as modulation from the chosen dose range. Please refer to [https://labadviser.nanolab.dtu.dk/index.php?title=Specific%20Process%20Knowledge/Lithography/EBeamLithography/BEAMER#ChipPlace the Beamer page for a guide on how to set this up.] | |||
Benefits: | |||
*Collects all pattern elements in a single V30 and a single JDI | |||
*Supports PEC modulation | |||
*Can easily generate dose labels written next to the array elements such that the user does not have to remember how the matrix is set up | |||
Drawbacks | |||
*A bit more time consuming to set up | |||
*Can generate very large V30 files since the design is repeated once per dose. For small designs this is no problem, for large (1 GB) designs this becomes a problem. | |||
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Example frome ChipPlace definine a 10 x 2 element dose matrix with relative doses from 1 to 2, ready for export to V30. Image: Thomas Pedersen. | |||
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=Scripted expansion of a PEC modulation table= | =Scripted expansion of a PEC modulation table= | ||