Specific Process Knowledge/Lithography/EBeamLithography/Dose Testing: Difference between revisions
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=Introduction= | |||
In E-beam lithography it is often necesarry to do a dose test in order to get the required result. In a dose test one will expose critical parts of a pattern with various doses and determine the best dose by SEM analysis of the final pattern. There are several ways to set up a dose test array on the JEOL system, in this section we will describe four different setups, each with their own benefits and drawbacks. | In E-beam lithography it is often necesarry to do a dose test in order to get the required result. In a dose test one will expose critical parts of a pattern with various doses and determine the best dose by SEM analysis of the final pattern. There are several ways to set up a dose test array on the JEOL system, in this section we will describe four different setups, each with their own benefits and drawbacks. | ||