|
|
| Line 207: |
Line 207: |
|
| |
|
| *[[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano1|1 - the first nanoetch]] | | *[[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano1|1 - the first nanoetch]] |
|
| |
| *[[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano3|Sinano3.0]]
| |
|
| |
| *[[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano31|Sinano3.1]]
| |
|
| |
| *[[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano32|Sinano3.2]]
| |
|
| |
| *[[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan33|Sinano3.3]]
| |
|
| |
| *[[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano34|Sinano3.4]]
| |
|
| |
| *[[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano35|Sinano3.5]]
| |
|
| |
| *[[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano36|Sinano3.6]]
| |
|
| |
|
| |
| *[[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano4|Sinano4.0]]
| |
