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Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions

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Bureaucrats, danchip, Administrators
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Jml (talk | contribs)
Bureaucrats, danchip, Administrators
1,918 edits
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! Nominal line width
! colspan="8" align="center"| Etch rates in trenches
! colspan="8" align="center"| Etch rates in trenches
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! Nominal line width
! colspan="8" align="center"| Etch rates in zep resist
! colspan="8" align="center"| Etch rates in zep resist
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