Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions
| Line 189: | Line 189: | ||
|113 | |113 | ||
|93 | |93 | ||
|- | |||
| | |||
! colspan="8" align="center"| Etch rates in zep resist | |||
! zep | |||
|18 | |||
|27 | |||
|35 | |||
|39 | |||
|54 | |||
|45 | |||
|38 | |||
|39 | |||
|- | |- | ||
|} | |} | ||
| Line 189: | Line 189: | ||
|113 | |113 | ||
|93 | |93 | ||
|- | |||
| | |||
! colspan="8" align="center"| Etch rates in zep resist | |||
! zep | |||
|18 | |||
|27 | |||
|35 | |||
|39 | |||
|54 | |||
|45 | |||
|38 | |||
|39 | |||
|- | |- | ||
|} | |} | ||