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Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions

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Bureaucrats, danchip, Administrators
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Jml (talk | contribs)
Bureaucrats, danchip, Administrators
1,918 edits
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! colspan="9" align="center"| Common parameters
! Process time (s)
! Process time (s)
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30 nm
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! colspan="8" align="center"| Etched depths
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! 30 nm
! 30 nm
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