Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions
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|120 | |120 | ||
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! Pressure (mtorr) | |||
2 2 2 2 2 2 5 10 | |||
|} | |} | ||
| Line 73: | Line 73: | ||
|120 | |120 | ||
|180 | |180 | ||
! Pressure (mtorr) | |||
2 2 2 2 2 2 5 10 | |||
|} | |} | ||