Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions
| Line 45: | Line 45: | ||
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! Coil power (W) | ! Coil power (W) | ||
|900 | |900 (Load) | ||
|900 | |900 (Forward) | ||
|900 | |900 (Forward) | ||
|900 | |900 (Forward) | ||
|900 | |900 (Forward) | ||
|900 | |900 (Load) | ||
|900 | |900 (Load) | ||
|900 | |900 (Forward) | ||
|- | |- | ||
!Platen power (W) | !Platen power (W) | ||