Jump to content

Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions

← Older editNewer edit →
VisualWikitext
Jml (talk | contribs)
Bureaucrats, danchip, Administrators
1,918 edits
Jml (talk | contribs)
Bureaucrats, danchip, Administrators
1,918 edits
Line 23: Line 23:
|15
|15
|15
|15
|-
!BCl<sub>3</sub>
|5
|3
|5
|5
|5
|0
|5
|5
|-
!HBr
|15
|17
|15
|15
|15
|0
|0
|0
|-
|-
|}
|}
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/ICP_Metal_Etcher"