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Specific Process Knowledge/Characterization/MicroSpectroPhotometer (Craic 20/30 PV): Difference between revisions

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|style="background:WhiteSmoke; color:black"|<b>Power (W)</b>
|style="background:WhiteSmoke; color:black"|<b>Aperture Number</b>
|style="background:WhiteSmoke; color:black"|<b>Pressure (mTorr)</b>
|style="background:WhiteSmoke; color:black"|<b>Aperture Size (µm)</b>
|style="background:WhiteSmoke; color:black"|<b>Time (s)</b>
 
|style="background:WhiteSmoke; color:black"|<b>Total Thickness (nm)</b>
|style="background:WhiteSmoke; color:black"|<b>Deposition rate (nm/s)</b>


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|500
|<p style="color:red;"><b>1</b></p>
|3
|100.2
|183
|94.2
|<p style="color:red;"><b>0.51</b></p>


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|400
|<p style="color:red;"><b>2</b></p>
|3
|75.3
|228
|94.1
|<p style="color:red;"><b>0.41</b></p>


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|300
|<p style="color:red;"><b>3</b></p>
|3
|52.0
|304
|93.53
|<p style="color:red;"><b>0.31</b></p>


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|200
|<p style="color:red;"><b>4</b></p>
|3
|25.0
|456
|92.61
|<p style="color:red;"><b>0.2</b></p>


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|100
|<p style="color:red;"><b>5</b></p>
|3
|12.1
|913
 
|89.99
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|<p style="color:red;"><b>0.1</b></p>
|<p style="color:red;"><b>6</b></p>
|5.9
 
 
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