Specific Process Knowledge/Characterization/SEM Gemini 1/ma

Instrument logon

Windows logon on the Operator station PC Use the Windows logon 'sem' with password 'sem1'

SmartSEM logon Use your own SmartSEM logon and password created at the training session

Loading samples

Samples are generally loaded through the load lock so the users are not allowed to vent the SEM chamber. Certain sample holders, however, must be loaded through the SEM door - they are:

1. The 200 mm wafer holder
2. The STEM detector (requires specific training)
3. The filter holder (not sure about the purpose)

Users who want to use the sample holders above must have specific rights and/or training. ca

Sample mounting

The importance of correct sample mounting cannot be understated. This will ensure:

1. Optimum image conditions in terms of surface grounding, sample access
2. instrument safety