Specific Process Knowledge/Characterization/SEM Gemini 1/ma

Safety

Use only if correctly instructed

The SEM Gemini 1 is a state of the art High resolution SEM with latest technology on low acceleration voltage imaging. Compared to the Supra models in the cleanroom, the Gemini 1 features a lot of sophisticated features that require specific training in order to ensure:

• Instrument safety: If not correctly operated, the instrument may suffer irreparable damage.
• User value: The level of sophistication is very high so unless correctly instructed, chances are that a certain mode may be incorrectly applied and the user will only waste time.

Below is a list of features or modes that require specific training in addition to the 'standard' training. All specific trainings will be added to the personal LabManager competence page. If a user is observed using the instrument without proper training, the competences will revoked.

List of modes/features/detectors that require specific individual training

1. VP mode
2. NanoVP mode
3. STEM detector
4. aBSD detector
5. Loading 150 mm wafers
6. Sample bias

Noise cancellation systems

The cleanroom is far from being the optimum environment for the SEM Gemini 1 as there are too many sources of noise - whether they are acoustic, mechanic, electric or magnetic of nature. To suppress the impact of some of these sources of noise, the instrument is equipped with the following:

1. A Spicer Consulting SC24 Field Cancellation system: A frame with cancellation coils and controller
2. A TableStable Active Antivibration platform: Platform underneath the SEM and controller

It is essential that these systems be respected as an integral part of the instrument.

Instrument features

1. Airlock
2. Image Navigation
3. Plasma cleaner

Operating instructions

This manual only covers instructions on how to operate the instrument. If you look for advice on what parameters to use for specific samples, detectors, modes etc., you must consult Labadviser instead.

Getting started

Instrument logon

• Labmanager
• Windows
• SmartSEM

Operating the airlock

Transfer of 150 mm wafers

Requires specific training