Specific Process Knowledge/Characterization/SEM Gemini 1/ma: Difference between revisions
| Line 13: | Line 13: | ||
# NanoVP mode | # NanoVP mode | ||
# STEM detector | # STEM detector | ||
# | # aBSD detector | ||
# Loading 150 mm wafers | # Loading 150 mm wafers | ||
# Tandem deceleration | # Tandem deceleration | ||