Specific Process Knowledge/Characterization/SEM Gemini 1/ma: Difference between revisions
Created page with "= Safety= The SEM Gemini 1 is a state of the art High resolution SEM with latest technology on low acceleration voltage imaging. Compared to the Supra models in the cleanroom, the Gemini 1 features a lot of sophisticated features that require specific training in order to ensure: * Instrument safety: If not correctly operated, the instrument may suffer irreperable damage. * User value: The level of sophistication is very high so unless correctly instructed, chances are t..." |
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==List of modes/features/detectors that require specific individual training == | ==List of modes/features/detectors that require specific individual training == | ||
# NanoVP mode | # NanoVP mode | ||
# STEM detector | # STEM detector | ||
# BSED detector | # BSED detector | ||
# Loading 150 mm wafers | # Loading 150 mm wafers | ||
# | # Tandem deceleration | ||
Revision as of 09:17, 25 September 2023
Safety
The SEM Gemini 1 is a state of the art High resolution SEM with latest technology on low acceleration voltage imaging. Compared to the Supra models in the cleanroom, the Gemini 1 features a lot of sophisticated features that require specific training in order to ensure:
- Instrument safety: If not correctly operated, the instrument may suffer irreperable damage.
- User value: The level of sophistication is very high so unless correctly instructed, chances are that a certain mode may be incorrectly applied and the user will only waste time.
Below is a list of features or modes that require specific training in addition to the 'standard' training. All specific trainings will be added to the personal LabManager competence page. If a user is observed using the instrument without proper training, the competences will revoked.
List of modes/features/detectors that require specific individual training
- NanoVP mode
- STEM detector
- BSED detector
- Loading 150 mm wafers
- Tandem deceleration