Specific Process Knowledge/Lithography/EBeamLithography/JEOL Compilation Computer: Difference between revisions
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=JEOL Compilation Computer (JCC)= | |||
From the external Beamer PC (dtu-em00awqd) it is possible to remotely compile job files on the JEOL Compilation Computer (JCC), thus it is possible to verify that job files compiles as intended. Once a set of job files are found to compile as intended they can then be moved to the JEOL 9500 computer for re-compilation and exposure. Remember to book and log in on the external Beamer PC when using this. | From the external Beamer PC (dtu-em00awqd) it is possible to remotely compile job files on the JEOL Compilation Computer (JCC), thus it is possible to verify that job files compiles as intended. Once a set of job files are found to compile as intended they can then be moved to the JEOL 9500 computer for re-compilation and exposure. Remember to book and log in on the external Beamer PC when using this. | ||
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The desktop of the external Beamer PC can be turned into something that resembles the JEOL 9500 interface for remote compilation. Illustration: Thomas Pedersen. | |||
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The following describes how to remotely access the JCC from the external Beamer PC. | The following describes how to remotely access the JCC from the external Beamer PC. | ||
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#The base unit for shot pitch is 0.5 nm instead of 0.25 nm. Thus, if you intend to exposure with 4 nm shot pitch you will use SHOT A, 8 on the JCC while you should use SHOT A, 16 on the JEOL 9500 system | #The base unit for shot pitch is 0.5 nm instead of 0.25 nm. Thus, if you intend to exposure with 4 nm shot pitch you will use SHOT A, 8 on the JCC while you should use SHOT A, 16 on the JEOL 9500 system | ||
#The JCC is slower than the JEOL 9500 computer. Hence for large V30 files it is quite slow and one should consider going to the cleanroom and compile on the JEOL 9500 computer instead. | #The JCC is slower than the JEOL 9500 computer. Hence for large V30 files it is quite slow and one should consider going to the cleanroom and compile on the JEOL 9500 computer instead. | ||