Specific Process Knowledge/Lithography/EBeamLithography/JEOL Compilation Computer: Difference between revisions
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The desktop of the external Beamer PC can be turned into something that resembles the JEOL 9500 interface for remote compilation. Illustration: Thomas Pedersen. | The desktop of the external Beamer PC can be turned into something that resembles the JEOL 9500 interface for remote compilation. Illustration: Thomas Pedersen. | ||
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==Limitations== | |||
The JCC only has a single working condition file (CALPRM) and that is '''2na_ap4'''. Thus it is necesarry to compile with this condition file in all sequences of the SDF file. To get accurate meaningful calculations of shot time and execution time you should however keep the STDCUR at the intended beam current in the JDF file. Remember to change the CALPRM command when transfering the files to the JEOL 9500 system. | |||