Specific Process Knowledge/Lithography/EBeamLithography/JEOLAlignment: Difference between revisions
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==System calibration== | ==System calibration== | ||
Execution | Execution of an aligned exposure has the same initial calibration steps as an unaligned exposure, i.e. it has the following steps | ||
*Select and restore the system to the chosen beam current profile ('''RESTOR''') | *Select and restore the system to the chosen beam current profile ('''RESTOR''') | ||