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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Line 519: Line 519:
| -1.1±1.2
| -1.1±1.2


|-
|-style="background:WhiteSmoke; color:black"
|rowspan="2"|4 alignment marks
375nm, low res camera
(Taran Apr 2023)
|'''X'''
| 5
|rowspan="2" align="center"|0.004
| -0.95±0.13
| -0.92±0.05
| -1.1±2.5
| -0.8±1.3
|-
|-style="background:WhiteSmoke; color:black"
|'''Y'''
| 7
| 0.1±0.1
| 0.07±0.06
| -1.1±1.7
| -0.8±2.5
|-
|-style="background:WhiteSmoke; color:black"
|rowspan="2"|4 alignment marks
375nm, high res camera, fast exposure
(Taran Apr 2023)
|'''X'''
| 7
|rowspan="2" align="center"|0.003
| -0.65±0.05
| -0.63±0.05
| -0.6±1.7
| 0.3±1.2
|-
|-style="background:WhiteSmoke; color:black"
|'''Y'''
| 8
| -0.25±0.05
| -0.26±0.05
| 0.3±1.7
| -0.3±1.2
|-
|-style="background:WhiteSmoke; color:black"
|rowspan="2"|2 alignment marks
375nm, high res camera
(Taran Apr 2023)
|'''X'''
|NA
|rowspan="2"|NA
| -0.75±0.3
| -0.75±0.05
| -8.9±1.7
| -1.4±2.5
|-
|-style="background:WhiteSmoke; color:black"
|'''Y'''
| NA
| -0.55±0.28
| -0.58±0.05
| -6.1±2.5
| -0.8±1.2


|-
|-
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