Specific Process Knowledge/Lithography/EBeamLithography/JEOLRequest: Difference between revisions
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'''Prealignment:''' Please indicate if you need prealignment. | '''Prealignment:''' Please indicate if you need prealignment. | ||
'''Estimated execution time:''' State the expected execution time. Either from your own calculation or from the compilation program. | |||
==Usage conditions== | ==Usage conditions== | ||