Specific Process Knowledge/Lithography/EBeamLithography/EBLProcessExamples: Difference between revisions
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This page is under construction. In time we will fill it with relevant process examples and relevant data. | This page is under construction. In time we will fill it with relevant process examples and relevant data. | ||
=Mix-and-match with EBL and UV lithography= | |||
Using mix-and-match it is possible to combine EBL and UV lithography using selected resists. Read more on the [[Specific_Process_Knowledge/Lithography/Mix-and-match|Mix-and-match page.]] | |||
=Single spot EBL on JEOL 9500= | =Single spot EBL on JEOL 9500= | ||