Specific Process Knowledge/Lithography/EBeamLithography/JEOLRequest: Difference between revisions
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=Request for user exposure slot= | =Request for user exposure slot= | ||
As of October 1st 2023 all exposure slots on the JEOL 9500 system are managed and delegated by the Nanolab EBL staff. In order to get an exposure slot users must request a slot by submitting a request form AND prepared job files for the exposure. The EBL staff will then assign a user a slot of an appropriate length for the exposure. We will try and group exposure jobs together to minimize cassette changes by loading multiple substrates in a single cassette whenever possible. | As of October 1st 2023 all exposure slots on the JEOL 9500 system are managed and delegated by the Nanolab EBL staff. In order to get an exposure slot users must request a slot by submitting a request form AND prepared job files for the exposure. The EBL staff will then assign a user a slot of an appropriate length for the exposure. We will try and group exposure jobs together to minimize cassette changes by loading multiple substrates in a single cassette whenever possible. | ||
When a slot is granted it must be used for the intended job and nothing else. Please see usage conditions below. | |||
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*Exposures must start as soon as possible in a given slot. Hence the user must have the substrate(s) mounted (and prealigned if needed) such that the cassette can be loaded immediately when the booking starts. | *Exposures must start as soon as possible in a given slot. Hence the user must have the substrate(s) mounted (and prealigned if needed) such that the cassette can be loaded immediately when the booking starts. | ||
*If your substrate for some reason can not be ready in time you must notify us on the request email as soon as possible. | *If your substrate for some reason can not be ready in time you must notify us on the request email as soon as possible. You can not change your job to something else without approval. | ||
==Last minute job changes== | |||
Minor changes can be made to a job between submission and exposure. These changes may not affect execution time in any significant way. If you need to make significant changes to a job you must notify the EBL staff on the request email address. | |||
If we see users submitting "dummy jobs" with the sole purpose of obtaining an exposure slot and then execute vastly different jobs | |||
=Request for exposure by Nanolab= | =Request for exposure by Nanolab= | ||
At a later point in time we will open up for a limited service where Nanolab will carry out exposures on behalf of users. | At a later point in time we will open up for a limited service where Nanolab will carry out exposures on behalf of users. | ||