Specific Process Knowledge/Lithography/EBeamLithography/JEOLRequest: Difference between revisions
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Requests are made per cassette. Hence if you need more than one cassette you will need to submit more than one request form and more than one set of job files. | Requests are made per cassette. Hence if you need more than one cassette you will need to submit more than one request form and more than one set of job files. | ||
'''Date:''' Please fill in the date of the request. | |||
'''Username:''' Please provide your Labmanger username in the username field. | '''Username:''' Please provide your Labmanger username in the username field. | ||
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'''Date and time:''' Consult the JEOL 9500 booking calendar. Find vacant slots and fill in up to four dates and times that will work for you. | '''Date and time:''' Consult the JEOL 9500 booking calendar. Find vacant slots and fill in up to four dates and times that will work for you. | ||
'''Cassette and window:''' | '''Cassette and window:''' Select the window(s) you would like to use. You do not ''need'' to select a cassette. You ''can'' however select a particular cassette if for some reason you have a preference between two (in principle) identical cassettes. If you do select a particular cassette please let us know in the comment field why you need that particular cassette. | ||
'''Job files:''' Job files must either be placed on the Cleanroom drive at "O:\CleanroomDrive\JEOL9500Jobs" or in the regular job folders on the JEOL 9500 computer. If you place the files on the Cleanroom drive please create a subfolder as [ddmmyy-initials] with the date being the same as put on the request form. | |||
'''SDF filename(s):''' Please provide the name of the SDF files(s). | |||
'''Prealignment:''' Please indicate if you need prealignment and hence need additional time for substrate loading. | |||
=Request for exposure by Nanolab= | =Request for exposure by Nanolab= | ||
At a later point in time we will open up for a limited service where Nanolab will carry out exposures on behalf of users. | At a later point in time we will open up for a limited service where Nanolab will carry out exposures on behalf of users. | ||