Specific Process Knowledge/Lithography/EBeamLithography/EBLsubstratePrep: Difference between revisions
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|AR- | |AR-N 7520.11 New | ||
| 0.25 L | |||
| 2024 | |||
| 0.25 | |||
|- | |||
|-style="background:LightGrey; color:black" | |||
|AR-N 7520.17 New | |||
| 0.25 L | |||
| 2026 | |||
| 0.25 | |||
|- | |||
|-style="background:LightGrey; color:black" | |||
|AR-N 7520.07 New | |||
| 1 L | |||
| 2018 | |||
| 0.8 | |||
|- | |||
|-style="background:LightGrey; color:black" | |||
|AR-N 7520.07 New | |||
| 1 L | |||
| 2018 | |||
| 0.8 | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|AR-N 8200.06 | |||
| 0.1 L | | 0.1 L | ||
| 2021 | | 2021 | ||