Specific Process Knowledge/Back-end processing/Micro transfer printer: Difference between revisions
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==Equipment performance and process related parameters== | ==Equipment performance and process related parameters== | ||
{|border="1" cellspacing="1" cellpadding="10" style="text-align:left;" | |||
!style="background:silver; color:black;" align="center" width="60"|Purpose | |||
|style="background:LightGrey; color:black"| | |||
|style="background:WhiteSmoke; color:black" colspan="2"| | |||
UV exposure | |||
|- | |||
!style="background:silver; color:black" align="left" rowspan="5"|Performance | |||
|style="background:LightGrey; color:black"|Exposure mode | |||
|style="background:WhiteSmoke; color:black" colspan="2"| | |||
*Flood exposure | |||
*Proximity exposure with mask possible for 4inch substrate | |||
*Inclined exposure | |||
*Rotating exposure | |||
|- | |||
| style="background:LightGrey; color:black"|Exposure light/filters | |||
|style="background:WhiteSmoke; color:black" colspan="2"| | |||
* Near UV(350-450nm) | |||
* Mid UV (260-320nm) | |||
* Deep UV(220-260nm) | |||
|- | |||
|style="background:LightGrey; color:black"|Minimum structure size | |||
|style="background:WhiteSmoke; color:black" colspan="2"| | |||
|- | |||
|style="background:LightGrey; color:black"|Mask size | |||
|style="background:WhiteSmoke; color:black" colspan="2"| | |||
5x5inch optinal | |||
|- | |||
|style="background:LightGrey; color:black"|Alignment modes | |||
|style="background:WhiteSmoke; color:black" colspan="2"| | |||
No alignment possible | |||
|- | |||
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | |||
|style="background:LightGrey; color:black"|Substrate size | |||
|style="background:WhiteSmoke; color:black" colspan="2"| | |||
Up to 8inch substrates, different shapes | |||
|- | |||
| style="background:LightGrey; color:black"|Allowed materials | |||
|style="background:WhiteSmoke; color:black" colspan="2"| | |||
All cleanroom materials | |||
|- | |||
|style="background:LightGrey; color:black"|Batch | |||
|style="background:WhiteSmoke; color:black" colspan="2"| | |||
1 | |||
|- | |||
|} | |||
<br clear="all" /> | |||
Revision as of 09:40, 31 August 2023
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| Purpose |
UV exposure | ||
|---|---|---|---|
| Performance | Exposure mode |
| |
| Exposure light/filters |
| ||
| Minimum structure size | |||
| Mask size |
5x5inch optinal | ||
| Alignment modes |
No alignment possible | ||
| Substrates | Substrate size |
Up to 8inch substrates, different shapes | |
| Allowed materials |
All cleanroom materials | ||
| Batch |
1 | ||