Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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The maskless aligner exposes the design in north-south oriented stripes (perpendicular to the flat). The stripes all have the same length, set by the height of the design, and only completely empty stripes are skipped. The writing speed may thus be affected by the layout of the design, as shown below. | The maskless aligner exposes the design in north-south oriented stripes (perpendicular to the flat). The stripes all have the same length, set by the height of the design, and only completely empty stripes are skipped. The writing speed may thus be affected by the layout of the design, as shown below. | ||
{| cellpadding="2" style="border: 2px solid darkgray;" align=" | {| cellpadding="2" style="border: 2px solid darkgray;" align="center" | ||
! width="350" | | ! width="350" | | ||
! width="350" | | ! width="350" | | ||