Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4: Difference between revisions
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[[Image:Peg3and4 front 2.JPG |frame| | [[Image:Peg3and4 front 2.JPG |frame|right|x300px|The DRIE-Pegasus3 and DRIE-Pegasus4 operator station and cassette loading stations, {{photo1}}]] | ||
'''The user manual and contact information can be found in LabManager:''' | '''The user manual and contact information can be found in LabManager:''' | ||