Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
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The ''Fields'' pane is very simple and can be used to limit the main or subfield dimensions. The maximum main field size is 1000 x 1000 µm<sup>2</sup> and the maximum subfield size is 4 x 4 µm<sup>2</sup>. | |||