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Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions

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Thope (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
2,179 edits
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''Overlap Method:'' Allows one to setup a pattern overlap between main fields to mitigate stiching problems. The overlap dimension is controlled with the ''Size'' fields. The methods available are:
''Share between fields:''
''Split Dose between Fields:''
''Interleaving:''
''Interleaving + extra field:''




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