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| == Proximity Error Correction (PEC) ==
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| BEAMER has a built-in proximity error correction simulation program; import the GDS-file as usual and connect the 'PEC' module to its output. In the 'Proximity Error Correction' window you can either type Beta and Eta manually or import a point spread function (PSF).
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| {| cellpadding="2" style="border: 2px solid darkgray;" align="right"
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| |[[File:beamer4.jpg|350px|left]]
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| |[[File:beamer5.jpg|350px|center]]
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| |[[File:beamer6.jpg|350px|right]]
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| |- align="center"
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| | Add a PEC-module on top of the import module. A Proximity Error Correction parameter window opens. Here, you can either type in values of alpha, beta and eta or load a point spread function.|| After converting to v30-format, the dose variation is illustrated in your pattern || BEAMER has at this point created a jdi-file in the same folder as the v30-file. This jdi-file is the shot modulation that should be inserted in the jdf-file. The jdi-file opens with SuperEdi.
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| |}
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