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| Example of the added dose labels. Image: Thomas Pedersen. | | Example of the added dose labels. Image: Thomas Pedersen. |
| |} | | |} |
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| == Beamer ==
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| The following is a short walkthrough of the most frequently used features of Beamer. For a more in depth look at Beamer please refer to GenISys own [https://www.genisys-gmbh.com/in-action.html learning material found here.]
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| The BEAMER software is used to convert files from GDSII format to v30-format. The BEAMER software is manufactured by GenISys (www.genisys-gmbh.de) and the software is installed on the ebprep computer.
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| The main functions of BEAMER are:
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| <pre>
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| Module Function
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| Import Imports a GDS, CIF or v30-file
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| Export Exports to GDS, CIF or v30-format
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| Grid Modifies the base unit of the imported file
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| Fracture Optimizes the fracturing of the layout
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| Heal Removes overlaps in the layout and joins abutting polygons
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| Bias Adds or subtracts geometrical bias to the pattern
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| Merge Merges two layouts
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| Minus Subtracts two layouts
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| PEC Proximity Error Correction
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| Split Splits the output in two
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| </pre>
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| [[File:beamer11.jpg|500px]] [[File:beamer10.jpg|250px]]
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| To use the modules, they are dragged to the process flow area.
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| The inputs and outputs of each module are illustrated by white tags. Two modules are coupled to each other by positioning the input of e.g. the Export module on top of the output of the Import module. The input/output tags turns black when they are connected.
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| By clicking on active modules, the layout of the file becomes visible in the layout view area.
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| <br clear="all" />
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| ==Node setups and usage examples== | | ==Node setups and usage examples== |
