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Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions

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==Beamer nodes==
==Beamer nodes==


A quick overview of the Beamer nodes is provided in the table below. The main nodes are described in further detail below.
A quick overview of the Beamer nodes and their purpose is provided in the table below. Specific parameters of each node can be looked up in the help section of Beamer.  


{| class="wikitable"
{| class="wikitable"
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| Import || Layout import
| Import || Layout import
|-
|-
| Export || Export to V30 and JDI
| Export || Export to JEOL V30 and Raith GDS
|-
|-
| Edit || Opens the pattern in LayoutEditor
| Edit || Opens the pattern in LayoutEditor