Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
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==Beamer nodes== | ==Beamer nodes== | ||
A quick overview of the Beamer nodes is provided in the table below. | A quick overview of the Beamer nodes and their purpose is provided in the table below. Specific parameters of each node can be looked up in the help section of Beamer. | ||
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| Import || Layout import | | Import || Layout import | ||
|- | |- | ||
| Export || Export to V30 and | | Export || Export to JEOL V30 and Raith GDS | ||
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| Edit || Opens the pattern in LayoutEditor | | Edit || Opens the pattern in LayoutEditor | ||