Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
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===Import node=== | ===Import node=== | ||
The import node is used to import geometry into Beamer. While we recommend GDS for import Beamer supports the following formats: GDSII, DXF, OASIS, CIF, TXL, LEDB, PNG, STL, JEOL51, JEOL52, Raith (VB6, FRE, GPF, IWFL), NuFlare, MEBES, Micronic, NPI, HIMT and ADVANTEST. | The import node is used to import geometry into Beamer. While we recommend GDS for import Beamer supports the following formats: GDSII, DXF, OASIS, CIF, TXL, LEDB, PNG, STL, JEOL51, JEOL52, Raith (VB6, FRE, GPF, IWFL), NuFlare, MEBES, Micronic, NPI, HIMT and ADVANTEST. | ||
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{| class="wikitable hideable hidden" border="1" cellspacing="0" cellpadding="0" align="left" width="400px" style="float:right;" | |||
! style="text-align:right;" | [[image:DUV6.jpg|center|400px|thumb|Photo: DTU Nanolab]] | |||
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==Node setups== | ==Node setups== | ||