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Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
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Thope (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
2,179 edits
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! Module/method !! Short description
! Module/method !! Short description
|-
|-
| Import || Used to import a layout
| -
| Export ||
| -
| Edit ||
| -
| Heal ||
| -
| Transform ||
| -
| Bias ||
| -
| AND, OR, MINUS, XOR, P-XOR, NOT ||
| -
| Extract ||
| -
| Replace ||
| -
| Merge ||
| -
| Grid ||
| -
| Mapping ||
| -
| Filter ||
| -
| Fracture ||
| -
| ChipPlace || Graphical interface to set up arrays of patterns and assign dose to each element, excellent for dose testing
|-
| Visual-Job ||
| -
| PEC || Used to apply Proximity Effect Correction to a pattern
| PEC || Used to apply Proximity Effect Correction to a pattern
|-
|-
| ChipPlace || Graphical interface to set up arrays of patterns and assign dose to each element, excellent for dose testing
| Shape-PEC ||
|-
| 3D-PEC ||
|-
| Corner-PEC ||
|-
| FDA ||
|-
| Rule-OPC ||  
|-
|-
| Booleans || Beamer has six boolean operators; AND, OR, MINUS, XOR, P-XOR and NOT
| 2D Simulation ||  
|-
|-
| Heal || Heal will remove pattern overlaps that would otherwise get exposed several times
| Metrology ||  
|-
|-
| Extract || Example
| Split ||  
|-
|-
| Fracture || Example
| Comment ||  
|-
|-
| Example || Example
|}
|}


==Node setups==
==Node setups==
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