Specific Process Knowledge/Characterization/SEM Gemini 1: Difference between revisions
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!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment | !colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment | ||
|style="background:WhiteSmoke; color:black"|<b>SEM | |style="background:WhiteSmoke; color:black"|<b>SEM Gemini 1 (Zeiss GeminiSEM 560)</b> | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="1"|Purpose | !style="background:silver; color:black" align="center" valign="center" rowspan="1"|Purpose | ||
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|style="background:LightGrey; color:black"|Resolution | |style="background:LightGrey; color:black"|Resolution | ||
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*1-2 nm (limited by vibrations) | *1-2 nm (limited by vibrations and acoustic noise) | ||
The resolution is strongly dependent on the type of sample and the skills of the operator | The resolution is strongly dependent on the type of sample and the skills of the operator | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="5"|Instrument specifics | !style="background:silver; color:black" align="center" valign="center" rowspan="5"|Instrument specifics | ||