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Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/SiO2 Etch: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
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Bghe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,317 edits
Line 95: Line 95:
|Pressure  
|Pressure  
|Fully open APC valve (8-9 mTorr)
|Fully open APC valve (8-9 mTorr)
|-
|Electromagnetic coils 'outer coil'/'inner coil'
|'0-10'A/'0-30'A


|-
|-
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