Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/TemperatureSettings: Difference between revisions
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Latest revision as of 11:00, 4 September 2025
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Correct settings for temperatures on Pegasus 2
The Platen chiller temperature is enabled and the setpoint is 20 degrees as seen in the image below. This setting could be applied to all the heaters, however, the best way by far is to run the processes without enabling the heaters as seen for the other heaters.
