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'''Theoretical part'''
'''Theoretical part'''
The location of the lectures will be notified in the Doodles
 
The locations for the lectures will be notified in the Doodles


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===Material for preparations and further information===
==Presentations from the lectures==
 
 
 
 
====Presentations from the lectures====


<big>Slides from the 1<sup>st</sup> lecture</big>
<big>Slides from the 1<sup>st</sup> lecture</big>
* See LabManager (required login)
*[https://labmanager.dtu.dk/function.php?module=MiscDocument&view=docs&page_id=387f  See LabManager (requires a login)]
<!--[[Media:1_DTU_Nanolab_Thin_Film_TPT_final_April_2023.pptx]]-->
<!--[[Media:1_DTU_Nanolab_Thin_Film_TPT_final_April_2023.pptx]]-->


<big>Slides from the 2<sup>nd</sup> lecture</big>
<big>Slides from the 2<sup>nd</sup> lecture</big>
*[https://labmanager.dtu.dk/function.php?module=MiscDocument&view=docs&page_id=387f  See LabManager (requires a login)]. <i>Notice that the presentation is divided into two parts</i>
<!--[[Media:2_DTU_Nanolab_Thin_Film_TPT_final_May2023.pptx]]-->
<!--[[Media:2_DTU_Nanolab_Thin_Film_TPT_final_May2023.pptx]]-->


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*[https://link.springer.com/content/pdf/10.1007%2F978-3-662-05179-5.pdf  K. Oura et al., (2003), Surface Science, Chapter 14: Growth of Thin Films]
*[https://link.springer.com/content/pdf/10.1007%2F978-3-662-05179-5.pdf  K. Oura et al., (2003), Surface Science, Chapter 14: Growth of Thin Films]


====Thermal Oxidation====
====Thermal oxidation====
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch13/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation]
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch13/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation]


Revision as of 08:52, 19 June 2023

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This page is written by DTU Nanolab internal

Thin Film TPT

DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.

Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures, before they apply for a training (i.e. it is possible to get a training and then attend the lectures afterwards).

Thin film tool package training (TPT)
Schedule

Theoretical part

1st lecture (2 - 2½ hours):

  • Introduction to thin films
  • Before you start - Material properties to consider
  • Overview of thin film techniques at DTU Nanolab
  • Equipment overview in LabAdviser
  • Thin film techniques – 1st part:
    • Thermal oxidation

Sign up for the next lecture here: https://nanolab.doodle.com/poll/k4pdm2n4bpseww5e.

No lecture will be held in July.

A date for a lecture in August has not been decided yet. If you want to attend the Thin Film TPT course this month, then send an email to thinfilm@nanolab.dtu.dk and let us know, when you are available.

Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.


2nd lecture (3 - 3½ hours):

  • Thin film techniques – 2nd part:
    • PVD (physical vapour deposition)
      • E-beam evaporation
      • Thermal evaporation
      • Sputtering
    • CVD (chemical vapour depostion)
      • LPCVD (low pressure chemical vapour deposition)
      • PECVD (plasma enhanced chemical vapour deposition)
    • ALD (atomic layer deposition)

Sign up for the next lecture here: https://nanolab.doodle.com/poll/4r3ydwzzbrdepgpf

No lecture will be held in July.

A date for a lecture in August has not been decided yet. If you want to attend the Thin Film TPT course this month, then send an email to thinfilm@nanolab.dtu.dk and let us know, when you are available.

Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.


Practical part

  • None
Location

Theoretical part

The locations for the lectures will be notified in the Doodles

Qualified prerequisites

None

Preparations

No preparation is required.

However, a good overview of thin film processes can be found in Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes (requires login).

Links to more literature about thin films can be found below.

Course responsible

The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)

Learning goals
  • Be aware of relevant material properties for thin films made in the cleanroom
  • Understand different thin film techniques
  • Compare and be able to select appropriate thin film technique


Presentations from the lectures

Slides from the 1st lecture

Slides from the 2nd lecture

Literature

Some literature about thin films can be found here (requires a login):

Introduction to thin films

Thermal oxidation

Stress in thin films

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