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'''Theoretical part'''
'''Theoretical part'''
* The location of the lectures will be notified in the doodles
The location of the lectures will be notified in the Doodles


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!Qualified prerequisites
!Qualified prerequisites
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* None
None
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!Preparations
!Preparations
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* Read [http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes] (Available online from DTU campus).
No preparation is required.
 
However, a good overview of thin film processes can be found in [http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes] (requires login).
 
Links to more literature about thin films can be found below.
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!Course responsible
!Course responsible
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*The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)
The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)
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*Lecture slide show [[Media:2_DTU_Nanolab_Thin_Film_TPT_final_May2023.pptx]]
*Lecture slide show [[Media:2_DTU_Nanolab_Thin_Film_TPT_final_May2023.pptx]]


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==Literature==
==Literature==

Revision as of 08:32, 19 June 2023

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This page is written by DTU Nanolab internal

Thin Film TPT

DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.

Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures, before they apply for a training (i.e. it is possible to get a training and then attend the lectures afterwards).

Thin film tool package training (TPT)
Schedule

Theoretical part

1st lecture (2 - 2½ hours):

  • Introduction to thin films
  • Before you start - Material properties to consider
  • Overview of thin film techniques at DTU Nanolab
  • Equipment overview in LabAdviser
  • Thin film techniques – 1st part:
    • Thermal oxidation

Sign up for the next lecture here: https://nanolab.doodle.com/poll/k4pdm2n4bpseww5e.

No lecture will be held in July.

A date for a lecture in August has not been decided yet. If you want to attend the Thin Film TPT course this month, then send an email to thinfilm@nanolab.dtu.dk and let us know, when you are available.

Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.


2nd lecture (3 - 3½ hours):

  • Thin film techniques – 2nd part:
    • PVD (physical vapour deposition)
      • E-beam evaporation
      • Thermal evaporation
      • Sputtering
    • CVD (chemical vapour depostion)
      • LPCVD (low pressure chemical vapour deposition)
      • PECVD (plasma enhanced chemical vapour deposition)
    • ALD (atomic layer deposition)

Sign up for the next lecture here: https://nanolab.doodle.com/poll/4r3ydwzzbrdepgpf

No lecture will be held in July.

A date for a lecture in August has not been decided yet. If you want to attend the Thin Film TPT course this month, then send an email to thinfilm@nanolab.dtu.dk and let us know, when you are available.

Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.


Practical part

  • None
Location

Theoretical part The location of the lectures will be notified in the Doodles

Qualified prerequisites

None

Preparations

No preparation is required.

However, a good overview of thin film processes can be found in Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes (requires login).

Links to more literature about thin films can be found below.

Course responsible

The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)

Learning goals
  • Be aware of relevant material properties for thin films made in the cleanroom
  • Understand different thin film techniques
  • Compare and be able to select appropriate thin film technique


Material for preparations and further information

Slides from the lectures

Slides from lecture 1

Slides from lecture 2


Literature

Some literature about thin films can be found here (requires a login):

Introduction to thin films

Thermal Oxidation

Stress in thin films

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