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Specific Process Knowledge/Characterization/KLA-Tencor Surfscan 6420: Difference between revisions

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''This page is written by DTU Nanolab  internal''
''This page is written by DTU Nanolab  internal''


==<span style="color:Red">EXPIRED. The KLA-Tencor Surfscan 6420 has has been removed from the cleanroom in April 2023. It has been replaced with the [Specific Process Knowledge/Characterization/Particle Scanner Takano|Particle Scanner Takano] that can be used instead.</span>==
==<span style="color:Red">EXPIRED. The KLA-Tencor Surfscan 6420 has has been removed from the cleanroom in April 2023. It has been replaced with the [[Specific_Process_Knowledge/Characterization/Particle_Scanner_Takano|Particle Scanner Takano]] that can be used instead.</span>==


== KLA-Tencor Surfscan 6420 ==
== KLA-Tencor Surfscan 6420 ==
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