LabAdviser/Courses/TPT Thin Film: Difference between revisions
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The next lecture will be held on the 15th of June from 9:00 to 12:00. | The next lecture will be held on the 15th of June from 9:00 to 12:00. | ||
No lecture will be held in July | |||
The dates for the lectures in August or September have not been decided yet. If you want to attend the Thin Film TPT course one of these months, then send an email to thinfilm@nanolab.dtu.dk and let us know, when you are available. | |||
Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i> | Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i> | ||
Revision as of 08:50, 12 June 2023
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This page is written by DTU Nanolab internal
Thin Film TPT
DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.
Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures, before they apply for a training (i.e. it is possible to get a training and then attend the lectures afterwards).
| Thin film tool package training (TPT) | |
|---|---|
| Schedule |
Theoretical part1st lecture (2 - 2½ hours):
Sign up for the next lecture here: https://nanolab.doodle.com/poll/k4pdm2n4bpseww5e. The next lecture will be held on the 13th of June 2023 from 10:00 to 12:00. No lecture will be held in July The dates for the lectures in August or September have not been decided yet. If you want to attend the Thin Film TPT course one of these months, then send an email to thinfilm@nanolab.dtu.dk and let us know, when you are available. Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.
2nd lecture (3 - 3½ hours):
Sign up for the next lecture here: https://nanolab.doodle.com/poll/4r3ydwzzbrdepgpf The next lecture will be held on the 15th of June from 9:00 to 12:00. No lecture will be held in July The dates for the lectures in August or September have not been decided yet. If you want to attend the Thin Film TPT course one of these months, then send an email to thinfilm@nanolab.dtu.dk and let us know, when you are available. Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.
Practical part
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| Location |
Theoretical part
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| Qualified prerequisites |
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| Preparations |
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| Course responsible |
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| Learning goals |
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Material for preparations and further information
Slides from the lectures
Slides from lecture 1
- Lecture slide show Media:1_DTU_Nanolab_Thin_Film_TPT_final_April_2023.pptx
Slides from lecture 2
- Lecture slide show Media:2_DTU_Nanolab_Thin_Film_TPT_final_May2023.pptx
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Literature
Some litterature can be found in the LabManager (required a login):
- S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes
- S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes
- M. Mattox,(2015) Handbook of Physical Vapor Deposition (PVD) Processing (Second Edition), Chapter 10: Atomistic Film Growth and Some Growth-Related Film Properties
- K. Oura et al., (2003), Surface Science, Chapter 14: Growth of Thin Film
- S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes
- S. Franssila, (2010), Introduction to Microfabrication, Chapter 7: Advanced Thin Films
- D. M. Mattox,(2015) Handbook of Physical Vapor Deposition (PVD) Processing (Second Edition), Chapter 10: Atomistic Film Growth and Some Growth-Related Film Properties
- K. Oura et al., (2003), Surface Science, Chapter 14: Growth of Thin Films