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===Breakdown voltage measurements===
===Breakdown voltage measurements===


Breakdown measurements have been down for A1 Boron Drive-in and Pre-dep furnace and the A3 Phosphorus drive-in furnaces in November 2021. The results can be found on this page:
Breakdown measurements have been done for A1 Boron Drive-in/Pre-dep furnace, A2 Gate Oxide furnace and A3 Phosphorus drive-in furnaces in November 2021.
For E1  Oxidation (8") furnace, it has been done in Febuary 2022.
The results can be found on this page:


*[[Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements]]
*[[Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements]]
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