LabAdviser/Courses/TPT Thin Film: Difference between revisions

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Thin Film TPT

DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.

Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures, before they apply for a training (i.e. it is possible to get a training and then attend the lectures afterwards).

Thin film tool package training (TPT)
Schedule	Theoretical part 1^st lecture (2 - 2½ hours): Introduction to thin films Before you start - Material properties to consider Overview of thin film techniques at DTU Nanolab Equipment overview in LabAdviser Thin film techniques – 1^st part: Thermal oxidation Sign up for the next lecture here: https://nanolab.doodle.com/poll/k4pdm2n4bpseww5e. The next lecture will be held on the 13th of June 2023 from 10:00 to 12:00. Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk. 2^nd lecture (3 - 3½ hours): Thin film techniques – 2^nd part: PVD (physical vapour deposition) E-beam evaporation Thermal evaporation Sputtering CVD (chemical vapour depostion) LPCVD (low pressure chemical vapour deposition) PECVD (plasma enhanced chemical vapour deposition) ALD (atomic layer deposition) Sign up for the next lecture here: https://nanolab.doodle.com/poll/4r3ydwzzbrdepgpf The next lecture will be held on the 15th of June from 9:00 to 12:00. Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk. Practical part None
Location	Theoretical part The location of the lectures will be notified in the doodles
Qualified prerequisites	None
Preparations	Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes (Available online from DTU campus).
Course responsible	The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)
Learning goals	Be aware of relevant material properties for thin films made in the cleanroom Understand importance of correct process pressure (for vacuum processes) Understand different thin film techniques Compare and be able to select appropriate thin film technique

Material for preparations and further information

Slides from the lectures

Slides from lecture 1

Lecture slide show Media:1_DTU_Nanolab_Thin_Film_TPT_final_April_2023.pptx

Slides from lecture 2

Lecture slide show Media:2_DTU_Nanolab_Thin_Film_TPT_final_May2023.pptx

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Literature

Thermal Oxidation

S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation

@@ Line 23: / Line 23: @@
 *Introduction to thin films
 *Before you start - Material properties to consider
+*Overview of thin film techniques at DTU Nanolab
 *Equipment overview in LabAdviser
-*Thin Film techniques – 1<sup>st</sup> part:
+*Thin film techniques – 1<sup>st</sup> part:
 **Thermal oxidation
@@ Line 38: / Line 39: @@
 '''2<sup>nd</sup> lecture (3 - 3½ hours):'''
-*Vacuum basics
+*Thin film techniques – 2<sup>nd</sup>  part:
-*Overview of different thin film techniques at DTU Nanolab – 2<sup>nd</sup>  part:
+**PVD (physical vapour deposition)
-*PVD (physical vapour deposition)
+***E-beam evaporation
-**E-beam evaporation
+***Thermal evaporation
-**Thermal evaporation
+***Sputtering
-**Sputtering
+**CVD (chemical vapour depostion)
-*CVD (chemical vapour depostion)
+***LPCVD (low pressure chemical vapour deposition)
-**LPCVD (low pressure chemical vapour deposition)
+***PECVD (plasma enhanced chemical vapour deposition)
-**PECVD (plasma enhanced chemical vapour deposition)
+**ALD (atomic layer deposition)
-*ALD (atomic layer deposition)
 <i>Sign up for the next lecture here: https://nanolab.doodle.com/poll/4r3ydwzzbrdepgpf
-The next lectures will be held on the 8th of May 2023 from 09:00 to 12:00 and on the 15th of June from 9:00 to 12:00.
+The next lecture will be held on the 15th of June from 9:00 to 12:00.
 Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i>